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Teraoka, Yuden; Yoshigoe, Akitaka
Applied Surface Science, 346, P. 580, 2015/08
Times Cited Count:0 Percentile:1.75(Chemistry, Physical)Teraoka, Yuden; Yoshigoe, Akitaka
Applied Surface Science, 343, P. 212, 2015/07
Times Cited Count:0 Percentile:1.75(Chemistry, Physical)Teraoka, Yuden; Moritani, Kosuke*; Yoshigoe, Akitaka
Applied Surface Science, 343, P. 213, 2015/07
Times Cited Count:0 Percentile:1.75(Chemistry, Physical)Teraoka, Yuden; Yoshigoe, Akitaka
Applied Surface Science, 339, P. 158, 2015/06
Teraoka, Yuden; Yoshigoe, Akitaka
Japanese Journal of Applied Physics, 54(3), P. 039204_1, 2015/03
Times Cited Count:2 Percentile:75.24(Physics, Applied)Yoshigoe, Akitaka; Teraoka, Yuden
Japanese Journal of Applied Physics, 54(3), P. 039201_1, 2015/03
Times Cited Count:0 Percentile:0.19(Physics, Applied)Teraoka, Yuden; Yoshigoe, Akitaka; Moritani, Kosuke*
Japanese Journal of Applied Physics, 54(3), P. 039202_1, 2015/03
Times Cited Count:0 Percentile:0.19(Physics, Applied)Yoshigoe, Akitaka; Sano, Mutsumi*; Teraoka, Yuden
Japanese Journal of Applied Physics, 54(3), P. 039203_1, 2015/03
Times Cited Count:0 Percentile:0.19(Physics, Applied)Teraoka, Yuden; Yoshigoe, Akitaka
Transactions of the Materials Research Society of Japan, 40(1), P. 85, 2015/03
Watanabe, Daisuke*; Che, D.-C.*; Fukuyama, Tetsuya*; Hashinokuchi, Michihiro*; Teraoka, Yuden; Kasai, Toshio*
Review of Scientific Instruments, 76(5), p.055108_1 - 055108_5, 2005/05
Times Cited Count:6 Percentile:33.46(Instruments & Instrumentation)A molecular beam technique for generating an intense pulsed hyperthermal molecular beam (HTMB) was developed. The beam source consists of a pulse valve, a cooling-water bottle that protectes the pulse valve from heat transfer of a high temperature nozzle, and the nozzle with a heater. The pulsed HTMB of HCl was practically generated and characterized by means of (2+1) resonance-enhanced multiphoton ionization and ion time-of-flight techniques.
Hachiue, Shunsuke; Teraoka, Yuden
Shinku, 48(5), p.343 - 345, 2005/05
Silicon oxynitride layers were formed by irradiation of nitrogen ion beams at silicon substrates with ultrathin oxide layers. The nitrogen beam was mass-selected N ion beam. The translational kinetic energy was about 3 keV. The dose was 6.310 ions/cm. This value is almost equal to the atom density at the Si(001) surface. Chemical bonding states of irradiated nitrogen atoms were analyzed by photoemission spectroscopy with synchrotron radiation. Although the nitrogen dose was a low density, N-1s photoemission spectra could be deconvoluted into four peaks. The chemical bonding state of each peak was assigned with a reference of a oxide layer thickness dependence of the N-1s photoemission peak profile.
Teraoka, Yuden
Denki Gakkai Gijutsu Hokoku, (970), p.10 - 15, 2004/07
Si(001) surfaces are oxidized by O molecules. The reaction schemes (oxide-layers formation, SiO desorption, their coexistence) are changed depending on the surface temperature and the gas pressure. The translational kinetic energy of incident O molecules is recognizing to be an important parameter for controlling surface chemical reactions. The issues concerning translational kinetic energy induced oxidation by O molecules at room temperature, effects of translational kinetic energy for SiO desorption processes at higher temperature than 1000 K, reaction mechanisms for coexistence of the SiO desorption and the oxide-layers formation in the temperature region from 900 K to 1000 K are reviewed.
Okada, Michio*; Moritani, Kosuke; Yoshigoe, Akitaka; Teraoka, Yuden; Nakanishi, Hiroshi*; Dio, W. A.*; Kasai, Hideaki*; Kasai, Toshio*
Chemical Physics, 301(2-3), p.315 - 320, 2004/06
Times Cited Count:14 Percentile:41.91(Chemistry, Physical)O molecules adsorb dissociatively on Cu{1 0 0} surfaces to form the oxygen-saturated surface with the coverage of 0.5 ML. It has been found that the oxidation has proceeded more than 0.5 ML by using 2.3-eV-O molecular beams. The kinetics of the adsorption reaction was the first order. This reveals that the collision-induced adsorption results in the adsorption of only one oxygen atom. On the other hand, the reaction kinetics showed the second order in the case of 0.6-eV-O incidence. This implies that tentative molecular adsorption takes place in such low collision energy case.
Teraoka, Yuden; Yoshigoe, Akitaka; Moritani, Kosuke
Shinku, 47(4), p.301 - 307, 2004/04
Recent research results on translational kinetic energy effects of incident oxygen molecules for Si(001) oxidation are summalized and introduced. The variation of surface temperature dependence of SiO desorption yield, oxygen uptake curves, and chemical bonding states depending on translational kinetic energy of oxygen molecules is described concretely. Eapecially, the translational kinetic energy effects on chemical reaction processes of concurrent oxide-layers formation and SiO desorption are discussed.
Okada, Michio*; Moritani, Kosuke; Goto, Seishiro*; Kasai, Toshio*; Yoshigoe, Akitaka; Teraoka, Yuden
Journal of Chemical Physics, 119(14), p.6994 - 6997, 2003/10
Times Cited Count:42 Percentile:78.24(Chemistry, Physical)The oxidation of Cu(001) with hyperthermal O molecular beams was investigated using X-ray photoemission spectroscopy in conjunction with a synchrotron light source. The efficiency of oxidation is higher than that with ambient thermal O. Further oxidation under oxygen coverage larger than 0.5 ML occurs rather inefficiently even for the 2.3 eV beam irradiation. We found such slow oxidation of Cu corresponding to the initial stage of the CuO formation can be interpreted in terms of a collision-induced-adsorption mechanism. The kinetics of the dissociative adsorption is well described using the first order kinetics in a simple Langmuir-type adsorption model.
Yoshigoe, Akitaka; Teraoka, Yuden
Japanese Journal of Applied Physics, Part 1, 42(9A), p.5749 - 5750, 2003/09
Times Cited Count:2 Percentile:10.73(Physics, Applied)We investigated oxidation reactions induced by the translational kinetic energy of O on an Si(001) surface treated with aqueous hydrofluoric acid (HF) solution by combining synchrotron radiation photoemission spectroscopy with supersonic molecular beam techniques. The oxidation reactions at room temperature did not progress following up to approximately 3600 L exposure of O with incident energy of 0.04 eV. On the other hand, the oxidation states up to the Si species including the Si, Si and Si species were formed when the incident energy was 3.0 eV. The thickness of oxidized layers was estimated to be 0.26 nm at the final oxidation stages. Thus, we concluded that the Si atoms at the top layers were oxidized by the translational kinetic energy of 3.0 eV.
Teraoka, Yuden; Yoshigoe, Akitaka
Oyo Butsuri, 71(2), p.1523 - 1527, 2002/12
The translational kinetic energy of incident molecules is an important parameter for the study of surface chemical reaction mechanisms. New adsorption reactions, induced by the O translational kinetic energy of several eV, have been found in the O/Si(001) system by applying the surface photoemission spectroscopy with supersonic molecular beam techniques and the high-energy-resolution synchrotron radiation. The termination of dangling bonds affected dominantly the oxidation of dimer backbonds. By controlling the translational kinetic energy of incident O molecules, the formation of oxide-layers with a sub-nanometer scale is possible at room temperature.
Teraoka, Yuden; Yoshigoe, Akitaka
Japanese Journal of Applied Physics, Part 1, 41(6B), p.4253 - 4260, 2002/06
Times Cited Count:39 Percentile:78.1(Physics, Applied)no abstracts in English
Teraoka, Yuden; Yoshigoe, Akitaka
Surface Science, 507-510(1-3), p.797 - 802, 2002/06
no abstracts in English
Teraoka, Yuden; Yoshigoe, Akitaka
OMICRON Nanotechnology Newsletter, 6(1), p.4 - 6, 2002/04
no abstracts in English